Name:     Leandro Léo Koberstein	Profession:    Silicon Chemistry
Relationship:	Country:  Brazil
Fórum de Estudantes 2002 CHIP IN THE PAMPA Porto Alegre, RS, BRAZIL, September 9-12, 2002 Canela, RS, BRAZIL, September 12-14,2002 PROGRAM Segunda Feira 09/9/2002 - Fabricação I 1. Study: Stop anisotropic etching in oxide thermally grown aiming use of SOI Wafers, Mariana Amorim Fraga, Leandro Léo Koberstein, Edgar Charry, Humber Furlan. - LSI-USP 2. Anisotropic Etching in Differents Temperatures Using KOH Solution and Protection of Si3N4, Leandro Léo Koberstein, Mariana Amorim Fraga, Humber Furlan and Edgar Charry. - LSI-USP